Department of Mechanical and Aerospace Engineering, University of Texas at Arlington, Arlington, USA
Research Article
Multi-Conceptual Mechanical Design Optimization of Capacitive Pressure Sensors via Finite Element Analysis with use of Anisotropic Behavior of Silicon <111> Crystal: Summary of Design Optimization Approaches
Author(s): Amir Javidinejad*
In the world of micro-mechanical design of micro-sensors, up to date, there has not been substantial considerations
given to the actual mechanical or structural aspect of the designs. Hence, most of the currently available designs are
challenged to linearize the “non-linear” sensor’s output by utilization of electronic circuitry. In this research work, a
micro-pressure diaphragm which possess linear pressure-deflection behaviour is designed via FEM optimization
techniques. The diaphragm is modelled as a Silicon (111) plane, which possess plane isotropic properties. A circular
centre boss section is added to the diaphragm and optimization is carried out, to achieve an optimum diaphragm
geometry that would allow for flat or rigid deflection of this boss section under the applied surface pressure loading.
The approximate closed−form deflection.. View more»